- Standard Features
- Carrier: 6" by 2x (cassette) or max up to 2" by 6x.
- Cradle & Glove: SUS316 material with grind polished finish.
- Ionizer: Power Unit and Static Bar.
- Vibration interlock sensors.
- Rotation: 100RPM-800RPM
- Motor: 1PH; AC220V; 4P; 0.75Kv; Inverter Control.
- Timer: range 0- 9999sec.
- SCD-02 PLC Digital Type Controller.
- Particle Spec: 0.2um size < 50ea or better.
- Upper Cover: Air cylinder driver (Open/Close).